Nano-Indentation Test Precision Analysis

【Author】

Meihua Liu~(1,*),Hongwei Ji~1,Hongqi Li~2,Jing Wang~3,Jingwei Tong~2 1 Mechanical Engineering Department,Tianjin University of Commerce,Tianjin,China 2 Mechanical Engineering Department,Tianjin University,Tianjin,China 3 Military Traffic Institute,Tianjin,China

【Abstract】

<正>The nano-indentation technique is widely applied to investigate the mechanical properties of thin films. Therefore,it should be explored that all factors influencing the reliability of test data for nano scale thin films. The paper discusses these factors including the contact point between indenter and tested object,shape and

【Keywords】

nano-indentation;;hardness;;elastic modulus;;precision analysis;;measure

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