Design of piezoelectric hydraulic pump based on MEMS valve

【Author】

Jian Sun;Yanju Liu;Jinsong Leng;

【Abstract】

<正>Morphing aircrafts adapt to different flight conditions and expand flight envelope by changing the wing parameters such as wing area,aspect ratio,backswept etc.However the additional weight of the morphing system is one of the most important limit factors. High-performance low-weight actuators would solve this problem

【Keywords】

MEMS;Design of piezoelectric hydraulic pump based on MEMS valve;

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