Thermoelastic damping of the axisymmetric vibration of bilayered circular plate resonators

【Author】

Yuxin Sun;Jialing Yang;Hua Liu;Yan Jiang;

【Abstract】

<正>For resonators,it is desired to design and construct systems with loss of energy as little as possible.As the MEMS and NEMS technology evolves,there is an increasing use of sophisticated structural geometries and advanced materials,especially lami-

【Keywords】

NEMS;Thermoelastic damping of the axisymmetric vibration of bilayered circular plate resonators;MEMS;

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