Determination of the engineer constants of piezoelectric thin film based on the piezoelectric constitution

【Author】

Shutao Song;Xuejun Zheng;Wei Liu;

【Abstract】

<正>Distinguishing with the previous method,the explicit expression of indentation load-depth(P-h) curve derived by the piezoelectric constitution is used to establish the supplemental equation, in which the electrical-mechanical properties of piezoelectric thin

【Keywords】

Determination of the engineer constants of piezoelectric thin film based on the piezoelectric constitution;test;

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