Mechanics of ion-bombardment induced instability of semiconductor surfaces

【Author】

Harley T.Johnson;Md.Zubaer Hossain;Jonathan B.Freund;

【Abstract】

<正>Semiconductor surfaces exposed to low energy ion-bombardment are unstable with respect to formation of submicron-scale ripples and dots.This phenomenon is widely understood to be due to a competition between surface roughening due to erosive and mass

【Keywords】

Mechanics of ion-bombardment induced instability of semiconductor surfaces;show;

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