Size-depdendent models for electrostatically actuated mems

【Author】

Binglei Wang;Shenjie Zhou;Junfeng Zhao;Xi Chen;

【Abstract】

<正>Size-dependent microbeam model and microplate model are proposed for electrostatically actuated MEMS using strain gradient elasticity theory and the principle of minimum potential energy. The size-dependent pull-in instability is then studied based on the

【Keywords】

MEMS;Size-depdendent models for electrostatically actuated mems;

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