Microsystems and mechanics

【Author】

Alberto Corigliano;Raffaele Ardito;Claudia Comi;Attilio Frangi;Aldo Ghisi;Stefano Mariani;

【Abstract】

<正>Microsystems(or Micro Electro Mechanical Systems,MEMS) are devices,like e.g.micro accelerometers,micro gyroscopes and micro pumps,whose dimensions are in the range of fractions of micrometers to millimetres with sensing and actuating functions.

【Keywords】

MEMS;Microsystems and mechanics;

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