Discharge characteristics under different low axial magnetic field profiles in helicon plasma




<正>Helicon discharge,which was introduced by Boswell in 1970~1 demonstrates a high plasma density(10~(17)-10~(20)m~(-3)).There are two kinds of wave(helicon wave and TG wave),which depend on the axial magnetic field,exist in helicon discharge.~2Since the discharge characteristic is governed by helicon wave and TG wave,the variation of axial magnetic field


helicon discharge;;the different magnetic field profiles;;discharge characteristics


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Total: 2 articles

  • [1] R.W.Boswell, Phys.Lett.A, Physics Letters A (Physics Letters A)
  • [2] F.F.Chen, Plasma Sources Sci.Technol, Plasma Sources Science Technology (Plasma Sources Science Technology)

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