A new five degree-of-freedom measurement method and system


Fengling you,Qibo feng and Bin zhang Key Laboratory of Luminescence and Optical Information,Ministry of Education, Beijing jiaotong University,Beijing,P.R.China,100044


<正>In this paper,a newly developed system for simultaneously measuring five-degree-of-freedom errors of machine tools is introduced.A single-mode fiber-coupled laser module is used to eliminate the beam drift of the laser source.Only a cube corner retro-reflector and a beam splitter are adopted in the moving target in order to sense the straightness errors and angle errors(pitch and yaw)respectively and simultaneously.A special prism(including a beam-splitter facet and an all-reflecting facet)was adopted to measure the roll.A simple common-path compensation method for laser beam drift is put forward,and a 2D position-sensitive detector and a lens are used to monitor angular drift of the laser beam. It is convenient to measure the parameters of the numerical control machine in workshop due to non-cable connecting between moving target and measurement head.The error analysis and theory analysis of roll which provide potent theoretical guidance in the future are given in detail.


five degree-of-freedom;;beam drift;;quadrant photodiode detector;;position sensitive detector


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Total: 19 articles

  • [1] KUANG Cui-fang, FENG Qi-bo, FENG Jun-yan, LIU Bin (School of Sciences , Beijing Jiaotong University, Beijing100044, China), Analyzing characteristic of the four-quadrant detector applied to laser alignment, Optical Technique,
  • [2] MO Chang tao 1,3 , CHEN Chang zheng 2, ZHANG Li li 3, SUN Feng jiu 1 1School of Science, Northeast University, Shenyang, Liaoning 110004, China 2Building Department, Shenyang Industry University, Shenyang, Liaoning 110023, China 3Foundation Department, Harbin Commerical University, Harbin, Heilongjiang 150076, China, Study on Background Light Compensation of Photo-Electric Position Sensitive Detector, Chinese Journal of Lasers,
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  • [4] Kuang Cuifang;Feng Qibo;Liu Bin, "A measurement method of straightness errors with common-path compensation for drift beam", Photoelectric Engineering,


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