Development and Applications of Linear Ultrasonic Motors


Zhiyuan Yao;Qianwei Fu;Ranran Geng;Yue Jian;Zhen Liu;


This paper proposed structural design methods for the development of high-efficiency linear ultrasonic motors(LUMs) that can be applied in robotic fields. A continuous variable cross-section Langevin vibrator was adopted for higher vibration efficiency of the stator. To improve the structural stability of the motor, the clamping component of the stator and the applying method of pre-pressure were modified as well. The clamping component was designed as a structure with flexible hinge. Furthermore, three types of LUMs were designed based on the proposed design methods. Experimental results showed that their feature size, maximum thrust, maximum speed and displacement resolution are 35-60 mm, 37 N, 1 mm/s and 50 nm, respectively, which indicated the designed LUMs had good output performance and precision. Finally, several applications of these designed LUMs including micromanipulator, absolute gravimeter and car top window were introduced.


Linear ultrasonic motor;;Structural design;;Clamping component;;Robotic application


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  • [1] ZHOU TieYing1, CHEN Yu1, LU CunYue1, FU DeYong1, HU XiaoPing2, LI Yi2 & TIANBin2 1 Department of Physics, Tsinghua University, Beijing 100084, China; 2 Boly Media Communications (Shenzhen) Ltd., Shenzhen 518031, China, Integrated lens auto-focus system driven by a nut-type ultrosonic motor (USM), Science in China(Series E:Technological Sciences),
  • [2] YAO Zhi-yuan, YANG Dong, ZHAO Chun-sheng (Precision Driving Laboratary, Nanjing University of Aeronautics and Astronautic, Nanjing 210016, Jiangsu Province, China), Structure Design and Power Flow Analysis of Bar-structure Linear Ultrasonic Motors, Proceedings of the CSEE,
  • [3] SU Songfei,YAO Zhiyuan,GENG Ranran,YE Ming(State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China), Structure design of a linear ultrasonic motor with a U-shaped vibrator, Journal of Harbin Engineering University,
  • [4] Hu Ning Yao Zhiyuan Zhao Wentao State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics,Nanjing,210016, Design of Clamping Components for a Linear Ultrasonic Motor, China Mechanical Engineering(中国机械工程),


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